ProScan H116/2 (Nikon) Large Format Motorized XY Stage
Heavy Load 8-inch Travel Stage for Nikon Industrial Microscopes (255 mm x 215 mm)
The ProScan H116/2 motorized XY stage is adapted for Nikon L200 and L300 industrial microscopes.
It has a long travel range and 25 kg load capacity for scanning large, heavy samples such as 8-inch semiconductor wafers, flat panel displays and printed circuit boards up to 200 mm diameter.
The H116/2 (Nikon) features Prior’s patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity together with a 2 mm ballscrew for speed. It scans large industrial samples reliably and efficiently.
Other drive configurations for increased speed may be available depending on your region.
It is compatible with transmitted light applications and provides easy access for loading samples.
This stage is compatible with Nikon NIS Elements software (appropriate package required).
- Directly compatible with Nikon industrial microscopes and software
- Supports 8-inch wafers, with extra X-axis travel range for easy sample loading
- Slim design maximizes clearance for wafer chucks and thick samples
- Excellent combination of speed and accuracy
- Intelligent Scanning Technology™ (US Patent 7,330,307)
| Travel range | 255 mm x 215 mm |
|---|---|
| Unidirectional repeatability | < 0.6 µm |
| Bidirectional repeatability | < 3.0 µm |
| Metric accuracy | 0.14 µm/mm |
| Full travel metric accuracy | < 30.9 µm |
| Resolution | 0.04 µm |
| Squareness | < 45 arcsec |
| Maximum velocity | 60 mm/s |
| Maximum load | 25 kg |
| Encoders | No |
| Motor type | 200 step |
| Screw pitch | 2 mm |
| Weight | 8 kg |
- H225 Glass plate (not suitable for transmitted light microscopy)
- H232 Aluminum plate (H116)
- H232B Aluminum plate (H116) with M4 and M6 tapped holes
- HWC20S Wafer chuck, rotatable with steps for 150 mm & 200 mm wafers
- HWC20V Wafer chuck, rotatable for vacuum for 200 mm wafers
H116_2_H116_STAGE-REF-IGES.zip
H116_2_H116_STAGE-REF-PART-NONAMES.zip
H116_2S-REFERENCE-IGES.zip
H116_2S-REFERENCE-PART-NONAMES.zip
H116-Stage-EN-UK-Datasheet.pdf
Nikon-EN-US-Sales-Guide.pdf
| Option | Manufacturer | Compatibility | Notes |
|---|---|---|---|
| H116/2 | Nikon | L300N, L300ND | Requires H2100 adapter from Prior |
| H116/2-8 | Nikon | L200N, L200ND | Requires H2100 adapter from Prior. Y-axis travel reduced by 12.7mm |
