ProScan H105NL/2 Motorized XY Stage
6-inch Semiconductor Scanning For Nikon LV100 LV150 Upright Microscopes (154 mm x 154 mm)
The ProScan H105NL/2 motorized XY stage provides 154 x 154 mm XY travel for Nikon LV100 and LV150 upright microscopes.
It is optimized for scanning 6-inch semiconductor wafers and other industrial samples. This travel range and high-precision motorized control are normally only available on larger systems.
The H105NL/2 features Prior’s patented Intelligent Scanning Technology (IST) to enhance accuracy and linearity together with a 2 mm ballscrew for speed.
The stage is compatible with Nikon NIS software (appropriate package required).
Several dedicated industrial sample holders are available: see the accessories tab for the full list.
- Directly compatible with Nikon LV100/LV150 and software
- Travel range supports 6-inch wafers on small industrial microscopes
- Intelligent Scanning Technology™ (US Patent 7,330,307)
- Additional clearance simplifies integration into OpenStand and other customized imaging systems
- Excellent combination of speed and accuracy
| Travel range | 154 mm x 154 mm |
|---|---|
| Bidirectional repeatability | < 2.7 μm |
| Metric accuracy | 0.17 µm/mm |
| Full travel metric accuracy | < 25 μm |
| Resolution | 0.04 μm |
| Squareness | < 45 arcsec |
| Maximum velocity | 60 mm/s |
| Maximum load | 10 kg |
| Encoders | No |
| Motor type | 200 step |
| Screw pitch | 2 mm |
| Weight | 5 kg |
- H227 Glass plate (not suitable for transmitted light microscopy)
- H231 Aluminium plate (H105)
- H231B Aluminium plate (H105) with M4 and M6 tapped holes
- HWC15S Wafer chuck, rotatable with steps for 100 mm and 150 mm wafers
- HWC15V Wafer chuck, rotatable for vacuum for 150 mm wafers
H105_2-REFERENCE-IGES.zip
H105_2-REFERENCE-PART-NONAMES.zip
H105NL-EN-Datasheet.pdf
Nikon-EN-US-Sales-Guide.pdf
| Option | Manufacturer | Compatibility | Notes |
|---|---|---|---|
| H105NL/2 | Prior | OpenStand-U | |
| H105NL/2 | Nikon | LV100ND, LV100NDA, LV150N, LV150NA |
