New multi-axis nanopositioning stage from Queensgate offers market-leading dynamic performance

19.06.25

Queensgate Instruments has expanded its range of high-performance nanopositioning stages with a 3-axis high-dynamic positioning stage. 

The QGNPS-XYZ-100D-20H features Queensgate’s proven NanoMechanism, which provides 100 µm travel in the X and Y axes plus 20 µm Z axis travel. Integrated capacitive positioning sensors provide unrivalled precision and accuracy: 0.25 nm resolution in XY, 0.085 nm resolution in Z, and 0.5 nm repeatability in all three axes.

When combined with the QGNPC-D-6330 multichannel digital controller, the stage provides market-leading dynamic performance. The calibration data and reference capacitor are stored in the stage to enable complete ‘plug-and-play’ interchangeability.  

The QGNPS-XYZ-100D-20H stage is robust and reliable with minimal rotational errors: flexure guidance guarantees pitch and yaw of <25 micro-radians over the full 100 μm travel in XY. Aluminum construction enables a fast response with typically sub-millisecond settle times, and four-corner mounting ensures the best dynamic stability.  

The stage was designed for applications in high-precision microscopy such as atomic force microscopy (AFM), scanning probe microscopy (SPM), and near-field scanning optical microscopy NSOM).  

Learn more about the NPS-XYZ-100D-20H and download the datasheet from nanopositioning.com.

Explore nanopositioning for AFM: The High-Speed Metrological AFM/Dimensional Metrology Group at NPL has published a paper on ‘Large area high-speed atomic force microscopy with arbitrary scan path playback’, which includes the use of Queensgate’s technology in this application. The paper is based on work carried out with funding from Innovate UK’s A4I scheme and is available as open access from IOP Science:

Large area high-speed atomic force microscopy with arbitrary scan path playback – IOPscience